ABSTRACT:

In the biological world, where the typical human cell is less than 10 μm in diameter, an average bacterium a few micrometers long, and the garden-variety virus about 100 nm in length, more and more researchers view microscopic tools known as biological microelectromechanical systems (bioMEMS) as the right choice for keeping patients alive and healthy. BioMEMS are an outgrowth of MEMS-the sensors, actuators, and other microchips-developed for the electronics industry. MEMS are present in everything from computers and ink-jet printers to automobile air bags and digital video projection systems.