PROJECT TITLE :

Simultaneous Control of Dielectric Charge and Device Capacitance in Electrostatic MEMS

ABSTRACT:

This letter presents a double closed loop for simultaneously controlling the online dielectric charge and the device capacitance in contactless electrostatic MEMS devices. The primary loop controls the web charge trapped within the dielectric layer by continuously monitoring the horizontal displacement of the $C$ – $V$ characteristic and applying bipolar actuation voltages to keep such internet charge at the target value. The second loop adapts the actuation voltages so that the measured capacitance matches a desired price while maintaining the first management of charge. [2015-0216]