PROJECT TITLE :

Dynamic Force Characterization Microscopy Based on Integrated Nanorobotic AFM and SEM System for Detachment Process Study

ABSTRACT:

In this paper, an integrated system, named dynamic force characterization microscopy (DFCM), is proposed to analyze the detachment method at little scale. This method is made by integrating a changed atomic force microscopy (AFM) cantilever, a laser displacement sensor and a nanorobotic manipulation system with scanning electron microscopy (SEM). The micropolystyrene bead and biological cell are taken as the samples, which are put on the substrate surface within SEM chamber initial. Then, the changed AFM cantilever is used to detach the sample below the driving of the nanorobotic manipulator. During this process, the detachment force is measured by the laser displacement sensor dynamically. All the whereas, the form changing of the sample is observed by SEM at nanometer resolution. The experimental results verify that DFCM integrates the accurate force measurement ability of AFM, the important-time high-resolution imaging ability of SEM and therefore the flexible manipulation ability of robot. It provides a unique approach for the dynamic force characterization at tiny scale, that will greatly profit the in-depth understating of the dynamic detachment process and also the characterization of material's mechanical property.