PROJECT TITLE :

A Novel Sol–Gel -Al2O3 Thin-Film-Based Rapid SAW Humidity Sensor

ABSTRACT:

During this paper, we tend to are proposing a novel rapid sol–gel skinny-film porous metal–oxide-based surface acoustic wave (SAW) humidity sensor. For the SAW sensor, the middle frequency of 43three.92 MHz has been selected, and also the device has been configured in a high-frequency oscillator circuit to explore the frequency response within the presence of water vapor. The sensitive skinny film of sol–gel -Al2O3 coated with a drop dry technique offers very high surface-to-volume ratio with the distribution of micropores creating the sensor highly sensitive for moisture detection. Pore morphologies of the film are studied by field emission scanning electron microscope and atomic force microscopy. The section of alumina of the film has been characterised with X-ray diffraction. The sensor has been tested from three% relative humidity (RH) to 85% RH. The proposed sensor has terribly quick ( s) response time and glorious yield ratio as compared with the traditional commercial capacitive aluminum oxide sensor. The sensitivity (three%–20% RH) and the hysteresis (3%–85% RH) are found to be one hundred twenty-Hz/% RH and zero.3%, respectively. The sensor will be helpful for different applications, together with moisture dispersion inside electronic gadgets, dryers, ovens, textile production, semiconductor device processing, food processing, medication, and sealed packages.